Alpha Quantum Solution

Alpha Quantum Solutions

EQUIPMENTS

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UV Eraser

Wafer UV Eraser

Drawer tray designed for manual mass production usage
Drawer tray designed for manual mass production usage
254nm non-contact exposure, no arc damage
Anti UV leakage / door lock safety design
Ozone free lamp design
Designed for easy operation and easy Eraser Lamp replacement
Eraser Lamp

Wafer UV Eraser Lamp

Cold cathode electrode design
Long Life Time, Short lead time
Can be installed side by side to enlarge exposure area
Ozone free lamp design
Designed for easy replacement
Auto UV Eraser

Auto Wafer UV Eraser

Wafer Auto load/unload
Online UV Intensity monitoring
254nm intense radiation
UV Resist Harderning

Wafer UV Resist Hardening

Enhancement of thermal resistance of photoresist
Prevent outgassing prior to ion implantation process
Charge neutralization and removal of stress
Increase Resist’s etching resistance
Minimize Lithographic-to-etch shrinkage, potentially reduces dispense volume
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